MT240 RF Plasma Systems
Covers the theory and practice of RF (Radio Frequency) plasma systems as used in semiconductor manufacturing processes such as etching, chemical vapor deposition (CVD) and sputter deposition. Includes plasma physics, RF power system components, power matching and match circuits, and applications in semiconductor manufacturing. Prerequisite: MT 112A or MT 112, MT 223, CH 100 or higher, WR 227, or instructor permission. Audit available. (See course content and outcomes.)
Credits: 3
| CRN | Class type | Location | Days & time | Dates | Seats available | Faculty | More info |
|---|---|---|---|---|---|---|---|
| 10151 | In-person lab | Rock Creek BLDG7 231 | TBATo be announced | From January 5 through March 21, 2026 | Eric J Kirchner | Books for CRN 10151
Class details for CRN 10151 Fees: $12 Notes: Class Meets: Mon 11-2/Tues 12-2 or Thurs 9-12/Fri 9-11 | |
| and In-person lecture | Rock Creek BLDG7 231 | TBATo be announced | From January 5 through March 21, 2026 |
Class schedule definitions
- Cost:
- cost is based on the number of credits – see tuition and fees
- Books:
- $0 or <$40 means low cost books (doesn't include other supplies like calculators)
- Register:
- use the CRN to register in MyPCC – see how to register
- Class types:
- see more about class types
-
- In-Person: Instructional time will happen in-person. Class meetings take place at specific times and locations.
- Online (no scheduled meetings): Instruction will take place through regular online activities and assignments with scheduled due dates. Classes do not have meeting times.
- Online (scheduled meetings): Instructional time will happen online. Class meetings will take place at scheduled days/times online.
- In-person & Online (scheduled meetings): Class meetings take place at a specific time & day, with some meetings in-person and some online, usually in Zoom.
- In-person & Online (no scheduled meetings): Class meetings are in-person and have additional online activities.
- Online (scheduled meetings) & Online (no scheduled meetings): classes meet remotely with additional online activities required.