Covers the theory and practice of vacuum as used in semiconductor manufacturing. Topics include vacuum principles, vacuum systems and their components such as pumps, gauges and valves, and finally vacuum trouble- shooting. Prerequisites: MT 101, MT 102, (MT 103 or MT 104), CH 100 or higher, WR 121, or instructor permission. Audit available.  (For detailed information, see the Course Content and Outcome Guide ).

Credits:
3.00
Registration:
To register, you need the CRNs (ex. 22398) of your selected classes.
Fees:
Please note that for many courses, additional fees may apply.
Textbooks:
To find textbooks, you need the CRN, Campus, Term & Course Number (ex. BA101).
  CRN Campus / Bldg / Rm Time Days Dates
 
40462 Rock Cr Campus / BLDG7 / 110 08:00 AM-09:50 AM M 22-Sep-2014 thru 08-Dec-2014
Instructor: Shelton Fu
Tuition: credit Fees: $12.00
and Rock Cr Campus / BLDG7 / 231 08:00 AM-10:50 AM Tu 23-Sep-2014 thru 09-Dec-2014
Instructor: Shelton Fu
 
43034 Rock Cr Campus / BLDG7 / 104 08:00 AM-09:50 AM Th 25-Sep-2014 thru 11-Dec-2014
Instructor: Shelton Fu
Tuition: credit Fees: $12.00
and Rock Cr Campus / BLDG7 / 231 08:00 AM-10:50 AM F 26-Sep-2014 thru 12-Dec-2014
Instructor: Shelton Fu