Covers a semiconductor processing system. Includes power, vacuum, gas, delivery, robotic and control systems. Focuses on maintenance and troubleshooting. Prerequisites: MT 227, 223, 240. Audit available.  (For detailed information, see the Course Content and Outcome Guide ).

Credits:
4.00
Registration:
To register, you need the CRNs (ex. 22398) of your selected classes.
Fees:
Please note that for many courses, additional fees may apply.
Textbooks:
To find textbooks, you need the CRN, Campus, Term & Course Number (ex. BA101).
  CRN Campus / Bldg / Rm Time Days Dates
 
21140 Rock Cr Campus / BLDG7 / 133 09:30 AM-01:20 PM MTu 01-Apr-2013 thru 11-Jun-2013
Instructor: Shelton Fu
Notes: Homework assignments done in our labs REQUIRED.
Tuition: credit Fees: $24.00
 
24343 Rock Cr Campus / BLDG7 / 133 09:30 AM-01:20 PM ThF 04-Apr-2013 thru 14-Jun-2013
Instructor: Shelton Fu
Notes: Homework assignments done in our labs REQUIRED.
Tuition: credit Fees: $24.00