Covers the theory and practice of vacuum as used in semiconductor manufacturing. Topics include vacuum principles, vacuum systems and their components such as pumps, gauges and valves, and finally vacuum trouble- shooting. Prerequisites: MT 101, MT 102, (MT 103 or MT 104), CH 100 or higher, WR 121, or instructor permission. Audit available.  (For detailed information, see the Course Content and Outcome Guide ).

Credits:
3.00
Registration:
To register, you need the CRNs (ex. 22398) of your selected classes.
Fees:
Please note that for many courses, additional fees may apply.
Textbooks:
To find textbooks, you need the CRN, Campus, Term & Course Number (ex. BA101).
  CRN Campus / Bldg / Rm Time Days Dates
 
40580 Rock Cr Campus / BLDG7 / 108 08:00 AM-09:50 AM M 23-Sep-2013 thru 09-Dec-2013
Instructor: Shelton Fu
Tuition: credit Fees: $12.00
and Rock Cr Campus / BLDG7 / 233 08:00 AM-10:50 AM Tu 24-Sep-2013 thru 10-Dec-2013
Instructor: Shelton Fu
 
44129 Rock Cr Campus / BLDG7 / 104 08:00 AM-09:50 AM Th 26-Sep-2013 thru 12-Dec-2013
Instructor: Shelton Fu
Tuition: credit Fees: $12.00
and Rock Cr Campus / BLDG7 / 233 08:00 AM-10:50 AM F 27-Sep-2013 thru 13-Dec-2013
Instructor: Shelton Fu